Fabrication control of the resonance frequencies of high- index-contrast microphotonic cavities
نویسندگان
چکیده
Microphotonic filters require precise control of the relative resonance frequencies of integrated dielectric micro-cavities. Using high-index-contrast microring resonators, we present, demonstrate, and analyze techniques allowing small and accurate corrections of resonance frequencies at fabrication. ©2006 Optical Society of America OCIS codes: (230.3120) Integrated optics devices; (230.4000) Microstructure fabrication; (230.5750) Resonators
منابع مشابه
Strain-tunable Photonic Band Gap Microcavity Waveguides at 1.55 μm Personnel
Concept and Key Idea Photonic-bandgap microcavities in optical waveguides have demonstrated cavity resonances at wavelengths near 1.55 μm band, quality factors on the order of 300, and modal volume at 0.055 μm3 in high-index contrast Si/SiO2 waveguides and GaAs air-bridge waveguides. Applications include zero-threshold microlasers, filters and signal routers. For tunability in Si microphotonic ...
متن کاملPrecision Fabrication Techniques for Microphotonic Devices
Microphotonic devices seek to miniaturize and integrate the components needed for optical networking. These devices have exacting fabrication tolerances for feature size, patternplacement, and surface roughness. Careful control of feature size is critical for resonant structures and phase-matching between coupled waveguides, while pattern-placement is essential for devices that rely on long-ran...
متن کاملDesign and Fabrication Process of MTF Phantom CT Scan
Introduction: One of the main steps in the optimization process in diagnostic imaging is the quality control of radiology devices. The usual method of CT scan calibration is used of a phantom. The phantom created a certain weakening for the radiation through which it passes. One of the most suitable methods for quantitative analysis of the resolution and contrast in CT scan im...
متن کاملDual-Band Evanescent-Mode Substrate Integrated Waveguide Band-pass Filter for WLAN Applications
A new multi-layer substrate integrated waveguide (SIW) structure is developed to design dual-band evanescent-mode band-pass filters (BPFs). Two independent series LC circuits are implemented by incorporating metallic irises in the different layers of the structure. The combination of the metallic irises with capacitive-plates is embedded inside the SIW to independently excite two evane...
متن کاملCalculation of High Frequency Fields in Resonant Cavities Based on Perturbation Theory*
The knowledge of the eigenmodes of resonant accelerator cavities is essential for the determination of their performance characteristics, comprising resonant frequencies and field distributions inside the cavities. Apart from the material properties the eigenmodes of a cavity depend on its geometry. In spite of the high elaborateness during the complex fabrication process, minor deviations of t...
متن کامل